Computational Cosserat Dynamics in MEMS Component Modelling

The modelling strategy and simulation of flexible components of MEMS are addressed in this article. A newly developed Cosserat Rod Element (CRE) approach is employed to model the nonlinear dynamic equations of motion for micro resonators. Models constructed using this approach seek to capture the most significant characteristics of a microstructure in a few variables governed by a few ordinary differential equations of motion. A Three-dimensional nonlinear dynamic model with a six-degree-of-freedom for a resonator that comprises a resonator membrane supported by four flexible beams is generated. For illustration, the nonlinear dynamical responses of the resonator with/without external forces and/or torques have been presented through numerical simulations.